A facility for the fabrication of semiconductor devices. Contains equipment for cleaning samples and semiconductor wafers, material deposition tools (polymers, dielectrics, metals), dry etch and wet etch, materials characterisation and profilometry, and nanoscale patterning using electron beam lithography and photolithography.
Key contact name:
W. Andrew Murray
Key contact email address:
w.a.murray@bristol.ac.uk
Website link:
https://www.bristol.ac.uk/cleanroom
Telephone number:
07758224963
Social media links/handles: