The Ambient Cluster Processing Facility is a custom-built glovebox tool that integrates different vacuum and liquid-based deposition technologies into a common inert glove box atmosphere. It comprises of ten glove box modules that are interconnected by a cutting-edge, semi-automated inert atmosphere transfer system. The Cluster boasts of a wide range of capabilities, including: thermal evaporation, sputtering, aerosol printing, screen printing, slot-die printing, dektak profilometry, atomic layer deposition (ALD), pulsed laser deposition (PLD), thin film encapsulation and metrology. The Cluster Tool also provides users access to a wide range of functional materials, ranging from transition metal oxides; organic and hybrid semiconductors; perovskites; photovoltaics; two-dimensional materials and polymer composites.
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